ISO 17973-2002 表面化学分析.中分辨率螺旋电子光谱仪.元素分析用能量标度的校准.pdf

标准号：ISO 17973-2002
实施状态：作废
中文名称：表面化学分析.中分辨率螺旋电子光谱仪.元素分析用能量标度的校准
英文名称：Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
发布日期：2002-10
被替代标准：ISO 17973-2016
代替标准：ISO/DIS 17973-2001
采用标准：BS ISO 17973-2003,IDT;NF X21-054-2006,IDT;X21-054PR,IDT
起草单位：ISO/TC 201
标准简介：This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
文件格式：PDF
文件大小：367.09KB
文件页数：18
（以上信息更新时间为：2019-11-23）



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