标准号：ISO 14606-2000
实施状态：作废
中文名称：表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法
英文名称：Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
发布日期：2000-10
被替代标准：ISO 14606-2015
代替标准：ISO/FDIS 14606-2000
采用标准：BS ISO 14606-2001,IDT;GB/T 20175-2006,IDT;NF X21-062-2008,IDT;X21-062PR,IDT;JIS K 0146-2002,IDT;JIS K 0146-2001,IDT
起草单位：ISO/TC 201
标准简介：This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.
文件格式：PDF
文件大小：197.62KB
文件页数：21
（以上信息更新时间为：2019-11-23）
ISO 14606-2000 表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法.pdf
(197.62 KB)
|
|
