标准号：IEC 62047-3-2006
实施状态：现行
中文名称：半导体器件.微机电设备.第3部分:拉伸试验的薄膜标准试验片
英文名称：Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
发布日期：2006-08
代替标准：IEC 47/1866/FDIS-2006
采用标准：DIN EN 62047-3-2007,IDT;BS EN 62047-3-2006,IDT;EN 62047-3-2006,IDT;NF C96-050-3-2006,IDT;JIS C 5630-3-2009,IDT;OEVE/OENORM EN 62047-3-2007,IDT;PN-EN 62047-3-2006,IDT
起草单位：IEC/TC 47
标准简介：This International Standard specifies a standard test piece, which is used to guarantee the
propriety and accuracy of a tensile testing system for thin film materials with length and width
under 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanical
systems (MEMS), micromachines and similar devices.
This International Standard is based on such a concept that a tensile testing system can be
guaranteed in propriety and accuracy, when the measured tensile strengths of the standard
test pieces, whose tensile strength is pre-determined, are within the designated range. It also
specifies the test pieces to minimize characteristics deviation among the pieces.
文件格式：PDF
文件大小：369.33KB
文件页数：24
（以上信息更新时间为：2019-11-25）
IEC 62047-3-2006 半导体器件.微机电设备.第3部分_拉伸试验的薄膜标准试验片.pdf
(369.33 KB)
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